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Monocrystalline Silicon Active Matrix Reflective Light Valve
Technical aspects :

 

Light Valve Target Specifications

  • Resolution : 2560 x 2048 (GXGA or QSXGA)
  • Pixel pitch : 15 µm
  • Aperture ratio: > 85%
  • Overall reflectivity > 50% for polarized light
  • Response time: 20 ms


15 cm wafer containing 4 GXGA active matrix chips

 

Fabrication & Technology

Light Valve technology : Liquid Crystal on Silicon (LCOS)
Si process: Alcatel Microelectronics 0.7 µm CMOS with HV extensions
Lithography : Stepper (field size 20 mm) + stitching
Back-end process : Planarization + light shielding + mirror electrodes
Mirrors : Glossy aluminum, 89% reflectivity

15 um pixels
Micrograph of individual pixel electrodes (15µm pitch, 0.7µm spacing,; AR > 90%)

 

Driving Electronics

Pixel addressing : Analog active matrix (DRAM type)
LC voltage range : up to 4 VRMS
Max. gate swing on pixel transistor : 12 V
Row driver : line per line select
Column driver : analog, 16-fold parallelism

Layout of integrated driver circuit
Integrated drivers

 

LC-Technology

2 LC-effects are considered :

  • RTN (Reflective Twisted Nematic)
  • DAP (Deformation of Aligned Phase)

Multi-device assembly compatible with existing production equipment

Optical response curve

Optical response curve

 

Demonstrators

1) Projection monitor (Barco)

Target Specifications

  • Full colour
  • Screen size : 70 cm to 1 m, perfectly flat
  • Reduced depth and weight
  • Screen luminance: 200 Cd/m2
  • Contrast : 100:1
  • Number of grey scales : 8 bit or analog
  •  

2) HUD (Head Up Display) (Sextant-Avionique)

Target Specifications

  • Brightness: >10000 Cd/m2
  • Field of view: 30°x20°
  • Resolution: 1 mrd

Head-up display mock-up

Head-up display mock-up

Side view of rear projector optical system

Side view of rear projector optical system

Rear projection workstation display

Rear projection workstation display

 

Other possible applications:

Projection-type :

Business projectors, projection monitors, home theatre, HUD for avionics and automotive

Viewfinder type :

Consumer (camcorder, games), GSM, VR headsets